A Large Rotation Angle Electrothermal Micromirror with Integrated Platinum Heater

机译：具有集成铂加热器的大型旋转角电热微镜

获取原文

页面导航

摘要
著录项
相似文献
相关主题

摘要

We report a single-crystal-silicon electrothermal micromirror with an integrated platinum heater. A large rotation angle of 124deg has been achieved at a dc voltage of 12.5 V. The resonant frequency of the device is 336 Hz

机译：我们用集成的铂加热器报告单晶硅电热微镜。在12.5V的直流电压下实现了124deg的大旋转角度。设备的谐振频率为336 Hz

著录项

来源
《IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference》|2006年||共2页
会议地点
作者
Lei Wu; Huikai Xie;
展开▼
作者单位

展开▼
会议组织
原文格式 PDF
正文语种
中图分类自动化技术、计算机技术;
关键词
elemental semiconductors; micro-optomechanical devices; micromirrors; optical design techniques; platinum; silicon; 12.5 V; 336 Hz; integrated platinum heater; single-crystal-silicon electrothermal micromirror;

机译：元素半导体;微光机械设备;微镜;光学设计技术;铂;硅;12.5 V;336 Hz;集成铂加热器;单晶体 - 硅电热微镜;

相似文献

外文文献
中文文献
专利

1. 124$^circ$ Rotation Angle Electrothermal Micromirror With Integrated Platinum Heater [J] . Wu L., Xie H. IEEE journal of selected topics in quantum electronics . 2007,第2期

机译：集成铂金加热器的124 $ ^ circ $转角电热微镜
2. 124$^circ$ Rotation Angle Electrothermal Micromirror With Integrated Platinum Heater [J] . Lei Wu, Huikai Xie IEEE journal of selected topics in quantum electronics . 2007,第期

机译：集成铂金加热器的124 $ ^ circ $转角电热微镜
3. Large rotation angle micromirror based on hypocycloidal electrothermal actuators [J] . Y. Xu, J. Singh, N. Chen Electronicsletters . 2010,第10期

机译：基于摆线电热致动器的大旋转角微镜
4. A Large Rotation Angle Electrothermal Micromirror with Integrated Platinum Heater [C] . Lei Wu, Huikai Xie IEEE/LEOS International Conference on Optical MEMs and their Applications . 2006

机译：具有集成铂加热器的大型旋转角电热微镜
5. Integrated passives and resonant inductive coupling as a displacement sensing mechanism for large piston/rotation micromirrors. [D] . Tseng, Victor Farm-Guoo. 2015

机译：集成的无源和共振感应耦合作为大活塞/旋转微镜的位移传感机构。
6. FR4-Based Electromagnetic Scanning Micromirror Integrated with Angle Sensor [O] . Hongjie Lei, Quan Wen, Fan Yu, 2018

机译：集成了角度传感器的基于FR4的电磁扫描微镜
7. 2D Scanning Micromirror with Large Scan Angle and Monolithically Integrated Angle Sensors Based on Piezoelectric Thin Film Aluminum Nitride [O] . Katja Meinel, Marcel Melzer, Chris Stoeckel, 2020

机译：基于压电薄膜铝氮化铝，具有大扫描角度和单片综合角度传感器的2D扫描微镜

A Large Rotation Angle Electrothermal Micromirror with Integrated Platinum Heater

摘要

著录项

相似文献

相关主题

期刊订阅