One Megapixel SLM with High Optical Fill Factor and Low Creep Actuators

机译：具有高光学填充因子和低蠕变执行器的一台百万像素SLM

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A one megapixel micromirror based SLM with two layer torsional mirror actuators was monolithically integrated on CMOS. The mirrors have a high optical fill factor and a very low level of mechanical creep when actuated

机译：具有两层扭转镜致动器的基于SLM的一台百万像素微镜的SLM在单层上整合在CMOS上。当镜子时，镜子具有高光学填充因子和非常低的机械蠕变水平

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《IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference》|2006年||共2页
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Friedrichs M.; Schmidt J.; Duerr P.; Bakke T.;
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正文语种
中图分类自动化技术、计算机技术;
关键词
CMOS integrated circuits; integrated optics; integrated optoelectronics; micro-optomechanical devices; microactuators; micromirrors; monolithic integrated circuits; spatial light modulators; CMOS; mechanical creep actuators; megapixel SLM; micromirror; monolithicall;

机译：CMOS集成电路;集成光学;集成光电子;微观机械设备;微致动器;微镜;单片集成电路;空间光调制器;CMOS;机械蠕变执行器;百万像素;微镜;微镜;微镜;

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One Megapixel SLM with High Optical Fill Factor and Low Creep Actuators

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