RuO_2 and Ru nanoparticles for MISiC-FET gas sensors

摘要

Nanotechnology or nanoscience refers to the fact that novel and unique properties of materials are obtained which are due to the small scale. When the particle size reaches nanoscale dimensions, the particle itself could be considered as a surface in three dimensions. For instance, the grain size can affect the conductivity and the resistivity of the material. In this work we have studied catalytically active nanoparticles of RuO_2 and pure Ru as gate material. The particles were synthesized by wet chemical procedure. These materials were chosen because they are conducting and catalytically active. A distinct shift in the depletion area of the capacitance versus voltage curve is observed when measured in oxidizing (synthetic air) and reducing gases (H_2, NH_3, CO and C_3H_6). For RuO_2 particles, the shift is typically ～200 mV for 1% H_2 in synthetic air and ～140 mV for Ru.