Reflow Microfabrication for Refractive Optical Components: Processes and Materials

摘要

With standard surface-micromachining, free-space micro-optical-benches can be constructed that contain mirrors and diffractive optics. This paper outlines a novel microfabrication process for integrating refractive optical elements, such as lenses, into surface-micromachining processes. The process involves melting the optical material after the raised structures have been assembled. The resulting lenses can have a wider range of focal lengths, and can be made from a wider variety of materials than previous work. This technique will allow integration and customization of micro-optical and micro-photonic systems for various application.