Fabrication of Polymer Electrostatic Mirror Device Using Hot Embossing and Ultra-Precision Cutting Technology

摘要

Recently, polymer micro device becomes one of the attractive research topics in MEMS, because of several advantages compared to silicon material, such as lower material cost, simple and cheap fabrication process by replication methods, softness, biocompatible material, etc. Soft material actuator requires less power to drive, therefore, driving circuit is simple, energy is saved, and application is widen; transparent property of PMMA is suitable for research in biomedical, micro fluidic devices, optical devices, etc. The PMMA-based electrostatic actuator was reported recently, where O_2 plasma was used to remove thin PMMA layer remained after hot embossing. Therefore, deformation of micro structures due to heat, and the surface roughness are concerned. In this research, we propose an efficient fabrication process for free-standing PMMA micro structures by hot embossing and ultra-precision cutting technique to remove the thin PMMA layer remained after hot embossing process. Then, to demonstrate the versatile capability of the technique in polymer MEMS, a high aspect ratio electrostatic PMMA micromirror will be fabricated and tested.