Liquid Lubrication of Micro-Electro-Mechanical-Systems

摘要

Micro-electro-mechanical-systems are small scale devices arising for silicon fabrication technology, and are currently a multibillion dollar industry. Due to their small scale and the poor tribological properties of silicon, the development of MEMS devices is currently limited by problem of severe friction and wear. Liquid lubrication is a promising solution here; however until now it has only be demonstrated on lab-based tribometers. To prove the benefits of liquid lubrication in practice, the current study develops and tests both micro-journal and micro-thrust hydrodynamic pad bearings, before incorporating them into actual micro-turbine energy harvester.