Changchun Institute of Applied Chemistry, Chinese Academy of Sciences, 5625 Renmin Street, Changchun 130022, China

摘要

We have comparatively studied the addition of chromium and vanadium in titania. Cr and V content were changed by means of insets placed in the titanium target. Structural, compositional and electrical analyses of different series of thin films, made by XRf, XRD, are presented. Electrical characterization not only showed that Cr doped layers were very sensitive to ethanol within a useful range for applications, but also allowed to verify that the electrical behaviour is dependent on the structure of film. Finally, the Cr and V concentrations that gives the best results in terms of sensing performances has been determined and a correlation between structural and electrical measurement has been evidenced.