A Gaussian model of the radius measurement of micro-optics has been developed and tested using simulations. The model is based on the propagation distances in the interferometer, a heretofore uninvestigated effect. The goal of the model is to determine the bias error in the radius due to the Gaussian Beam propagation model. After testing the model with varying conditions, we have concluded the following: the measured part is smaller than the input, the cat's eye and confocal positions have approximately the same error, radius error increases with smaller test parts, decreasing the numerical aperture increases the errors, and the propagation distances do not affect the radius. The outline of the experimental plan to be used to verify the results is given.
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