Automatic measurement of gauge blocks by Fourier transforming the scanned interferograms

摘要

This paper describes a fringe scanning Fourier transform method to automatically measure the fractional interference order in gauge block interferometry. The advantages of the proposed method are presented with the comparison of measurement results between the existing Fourier transform method and the fringe scanning Fourier Transform method. The configuration of automatic gauge block measuring system is also described, where the proposed method is applied. The standard uncertainty evaluation of the fractional interference order measurement with this method is given.