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On the Influence of Gauge Block Roughness Characteristic and Surface Treatment on Length Calibration by Optical Interferometry

机译:压差粗糙度特性和表面处理对光学干涉测量的影响

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摘要

The influence of gauge block preparation on their optical reflection properties is investigated. Results of length calibration experiments by optical interferometry performed on 9 steel gauge blocks having a wide range of surface roughness characteristics and pre-treatment are described. These data demonstrate that different conventional cleaning procedures and the use of appropriate wringing fluids have negligible effect on the reflection properties of the measurement surfaces of gauge blocks and platens.
机译:研究了规格块制剂对其光学反射性能的影响。描述了在具有宽范围的表面粗糙度特性和预处理的9钢量块上进行的光学干涉测量结果。这些数据表明,不同的传统清洁程序和适当的绞合流体的使用对测量块和压板的测量表面的反射特性具有可忽略的影响。

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