USING A NOVEL, COMPUTER CONTROLLED AUTOMATIC SYSTEM FOR LF NOISE MEASUREMENTS UNDER POINT PROBES

摘要

A system for automatic, wafer-level, low frequency, LF, fluctuation measurements on semiconductor devices, involving a novel, programmable biasing amplifier, PBA, is presented. The PBA is computer-controlled and can remotely bias device terminals and measure currents flowing through them to the common ground. Its inputs are traxial with the appropriate guard potentials applied to their inner shields. The system is designed specifically for LF noise measurements on microelectronics structures. It can operate in manual and automatic modes. In the latter, the biasing voltage ranges and their increments are programmable. The program execution is carried out by step-wise biasing voltage variations, followed by measurements of appropriate currents and their fluctuations, with Fourier analysis, completed by the data storage. The program is written in LabView graphical language for a personal computer, equipped with a digital I/O and a data acquisition cards. No additional electronics is needed for the system operation. The system calibration by thermal noise of resistances is proposed. Some measurement results on the state-of-the-art microelectronics devices are discussed.