Ceramic coatings can provide an ideal protection for MEMS (MicroElectroMechanical Systems) structures while imposing a great challenge in processing a prime, reliant coating clue to their inherent brittleness and defects formed during processing. In an attempt to compensate for the weakness of the ceramic coating, we have developed a low-temperature solution precursor process to create strain-tolerant, protective bilayer coating consisting of an integrated ceramic-organic hybrid material. The top ceramic coating offers an inert, protective layer whereas the underlying nanometer scale self-assembled organic coating provides compliance for the overlying hard coating. Together, these bilayers minimize mechanical and thermal stresses. In addition, organic self-assembled monolayers(SAM) act as a 'template' by forming a proper surface functionality for the subsequent growth of hard ceramic coatings. Molecular level understanding of the microstructure and micromechanics involved in the synthesis and processing of the coating is systematically studied by a variety of characterization techniques such as XRD, AFM, SEM/EDS and nanoindentation. This work is also complemented by numerical simulation to provide a clearer understanding of the stress development in the ceramic coating and its interfacial properties.
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