Multilayer Film Piezoelectric Lamb Wave Resonator for Several GHz Applications

摘要

We present a film piezoelectric Lamb wave (PLW) resonator based on a newly contrived multilayer film structure for several GHz applications. The multilayer film consists of two piezoelectric AlN layers that are excited by an intermediate electrode layer. Using numerical and experimental methods, we investigated the PLWs characteristics propagating in the multilayer film. Both the simulation and fabrication results indicated that a PLW mode with a phase velocity of above 25000 m/s can be excited in the multilayer film. These results show that our multilayer film structure is suitable for PLW resonators in the GHz range.