Measuring Line Scales and Grid Plates on a Non-Vision CMM equipped with a White Light Confocal Probe

摘要

To explore the technical feasibility of measuring and certifying Glass Line Scales and Grid Plates on a high accuracy CMM with an integrated chromatic confocal sensor. These white light confocal sensors do not rely on back lighting, are not capable of capturing 1000's of data points on a measured line, and have no image cleaning capability. What they do offer is a system that can calibrate artifacts up to 1000 mm in length with a very low uncertainty using a measurement technique quite different than normal optical sensors.