Design Concept for a High-Resolution Variable Included Angle Grazing Incidence Monochromator with a Varied Line Spacing Grating and a New Optics for Microfocusing

摘要

A novel design concept for a variable included angle Monk-Gillieson mounting monochromator with a varied line spacing grating is presented and the energy resolution is estimated by using the ray-tracing method. It is indicated that relatively high resolution is achieved even if one scans the photon energy with a fixed included angle. A novel microfocusing system, two-step Kirkpatric-Baez optics, is also proposed. The ray tracing results indicate that a submicron spot size in FWHM is achieved by focusing mirrors with commercially available slope errors at a relatively long working distance. Preliminary results from a prototype system for microfocusing are demonstrated, which shows that a spot size of several μm can be achieved by using cylindrical mirrors only.