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BULIDING MICROSTRUCTURES OF ORGANIZED CARBON NANOTUBES BY CHEMICAL VAPOR DEPOSITION

机译:用化学气相沉积构建有组织碳纳米管的微观结构

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Chemical vapor deposition (CVD) using ferrocene (Fe(C_5H_5)_2) and xylene (C_8H_(10)) is frequently employed to fabricate, and to investigate the growth mechanism of nanotubes on planar substrates. The growth of carbon nanotubes by this approach, as we observed, showed interesting self-organization behaviors at early growth stages, which is closely related to the ratio of catalyst over carbon in the depositing vapor and to the growth kinetics of CNTs. Investigation on the very early deposition stages of this CVD method demonstrated that, the self-organization of carbon nanotubes is determined by the way that the catalyst particles adhere to the substrate surface, and the growth kinetics following. By adjusting these factors at the early deposition stages, we successfully fabricated different microstructures of carbon nanotubes and continuous films of CNTs on flat silicon substrates. This provides ways to control the growth and self-organization of carbon nanotubes.
机译:使用二茂铁(Fe(C_5H_5)_2)和二甲苯(C_8H_(10))的化学气相沉积(CVD)经常用于制造,并研究纳米管对平面基材的生长机制。如我们所观察到的,通过这种方法的碳纳米管的生长在早期生长阶段显示了有趣的自组织行为,其与沉积蒸汽中碳催化剂和CNT的生长动力学密切相关。对该CVD方法的非常早期沉积阶段的研究表明,碳纳米管的自组织通过催化剂颗粒粘附到基材表面和伴随的生长动力学的方式确定。通过在早期沉积阶段调整这些因素,我们成功地制造了不同的碳纳米管和连续薄膜的扁平硅基衬底的连续薄膜。这提供了控制碳纳米管的生长和自组织的方法。

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