A new in situ method for testing the optical thickness of removed transparent elements

摘要

A new remote method for a fast inspection of the optical thickness of transparent elements is developed. The method is based on the use of an high order interference of white light reflected from the sample's sides. Method gives a possibility for in situ measuring the optical thickness of the sample with accuracy to ～0.5 nm on aperture before 100 mm and distance as far as some meters.