A development of prototype Infra-Red High-dispersion Spectrometer (IRHS) is described.IRHS is a cryogenic echelle spectrometer for 8.2-m Subaru Telescope,which will operate in the mid-infrared region.A=8 to 13 mum with resolving power of 200,000.To achieve such a high dispersion and broad bandwidth,a single crystal Germanium immersion grating is used as dispersion element.We succeeded in the fabrication of the prototype Ge immersion grating for the first time by electrolytic in-process dressing (ELID) micro-machining method.
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