Functional Testing and Calibration of Microsystems at Wafer Level

摘要

Functional testing and calibration of a number of microsystem sensor types with applied non-electrical stimuli has been developed in a collaboration between DELTA and Suss MicroTec. The economical potential in applying these tests is addressed and different test solutions are described. The tests are already offered as test services by DELTA and as commercially available equipment by Suss MicroTec.