Short Pulse Width Micromachining of Hard Materials Using DPSS Nd:YAG Lasers

摘要

The material processing results of an industrial, short-pulse duration (～15ns) DPPS YAG laser producing peak powers greater then 0.2MW is discussed in this paper. This peak power provides sufficient materials processing capability to meet the micro machining needs in the automotive, semiconductor, micro-electronic, medical and telecommunication industries. All hard and soft materials including: plastics, metals, ceramics, diamond and other crystalline materials are suitable candidates for the processing capability of this laser. Micron level features can be machined in these materials to a depth in excess of 1mm with high quality results. In most applications feature sizes can be achieved that are not possible or economical with existing technologies. The optical beam delivery system requirements, and overall micro-machining set-up are also described. The drilling and cutting versatility down to feature sizes of less then 7um, as well as complex shapes are shown. The wavelength, pulselength, and peakpower are described and related to their effect on recast, micro-cracking and materials removal raters. Material removal effects related to progressive penetration into the material will be reviewed. The requirements of thi DPSS laser technology to meet the operational requirements for high duty cycle operation in industrial environments is covered along with processing flexibility and lower operating cost.