Time-Resolved Diode Laser Spectroscopy for Dynamic Processes

摘要

The application of time-resolved tunable infrared diode laser spectroscopy (TDLAS) is still at the beginning of its full utilisation in industry and science, Recent investigations using a compact and transportable multi-component TDL spectrometer (IRMA) show the specific potential for fast detection of molecular species concentrations. Analysis of chemical interactions in non-equilibrium plasma processes is an important example in the large field of non-stationary processes. The use of time-resolved TDLAS has enabled progress not only in basic research but also for reliable on-line plasma process control.