Fabrication of Organic Thin-Film Transistors with Polymer Gate Insulators on Plastic Substrate

摘要

Active iayer patterned OTFT was obtained on a plastic substrate using the optimal growth condition of pentacene thin films as active layer and parylene thin films as passivation layer.Tranditional photolithography was performed to use a dry etch to pattern the material stack.The pentacene thin film and parylene thin film were deposited onto a plastic subsirate using PC-OVD and CVD,respectively.