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Temperature-dependence perturbations on LTP measurements

机译:LTP测量的温度依赖性扰动

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摘要

The Long Trace Profiler (LTP) has proved to be one of the major metrological aids for the characterization of synchrotron radiation optics. Currently the optical components installed at the beamlines face higher and higher demands, requiring a precise calibration and control of the measuring conditions. One important parameter to be considered while scanning is the temperature drifts afflicting the measuring sessions. We will review our experiences about the influence of this parameter on the LTP ability in measuring very accurate optical surfaces. It is possible to discriminate at least four major sources of perturbations due to temperature changes: air turbulence, deformation in theoptical train inside the LTP optics head, deformation of the optical surface under test (SUT) and deformation of the holders of the SUT itself. Some addresses on the curing of these perturbations can be obtained.
机译:长跟踪分析仪(LTP)已被证明是同步辐射光学器件表征的主要计量助剂之一。目前,安装在波束线上的光学元件面对更高且更高的需求,需要精确校准和控制测量条件。扫描时要考虑的一个重要参数是折叠测量会话的温度漂移。我们将审查我们关于该参数对测量非常精确的光学表面的LTP能力的影响的经验。由于温度变化,可以区分至少四个主要的扰动来源:风速湍流,LTP光学头部内部的光学火车的变形,被测光学表面的变形(SUT)和SUT本身保持器的变形。可以获得对这些扰动的固化的一些地址。

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