In-Plane Conductivities of Atomic Layer Deposited Yttria-Stabilized Zirconia Electrolytes for Solid Oxide Fuel Cells

摘要

We investigated oxide ion conductivities of ultra-thin (8nm-55nm) yttria-stabilized zirconia (YSZ) films produced by atomic layer deposition (ALD). In-plane oxide ion conductivities were measured as a function of film thickness, temperature, and yttria concentration in the film. We observed higher conductivities for thinner films due to the portion of oxide ion conduction along the surface increased. We also observed changes in conductivities by modifying yttria concentrations near the surfaces, and the optimal concentration near the surface was different from the bulk.