Pattering of Nanoporous Anodic Aluminum Oxide Arrays by Using Sol-gel Processing, Optical Photolithography and Plasma Etching

摘要

Anodic aluminum oxide (AAO) membranes, self-ordered nanoporous arrays, are attractive for many technical applications in the rapidly growing nanotechnology field. AAO membranes have been shown to serve as templates for fabrication of diverse nano-structures and membranes from other materials (e.g. polymers and metals). The modification of the AAO membrane pores with metals or semiconductor materials will be useful for the fabrication of novel materials and devices with new properties and functions. In addition, AAO membranes can be fabricated with a very high aspect ratio of pores. All of these properties make these nanoporous arrays very promising for application in design of new nanotechnology products, such as sensing devices, adsorbers, pre-concentrators, gas and liquid transport fields or membranes in microreactors or micro-power sources.