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AC response measurements of semiconductor gas sensors for temperature shift stimulation

机译:用于温度移位刺激的半导体气体传感器的AC响应测量

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More advanced application based on semiconductor gas sensors required more sophisticated measuring methods. To achieve better accuracy level often AC methods were implemented into measuring systems. In this work attention was paid on measuring method consist in characterise impedance response of gas sensitive layer as a function of work temperature shift. Working temperature was changed between 20°C to 750°C. Automation measuring system for characterising gas sensitive layer properties was described. Also the result of impedance and admittance measurements as a function of frequency and working temperature for commercial and in-house developed sensors was presented.
机译:基于半导体气体传感器的更高级应用需要更复杂的测量方法。为了实现更好的准确度,通常可以实现AC方法进行测量系统。在这项工作中,在测量方法上支付了备受关注,该方法包括作为工作温度偏移的函数的气体敏感层的阻抗响应。工作温度在20℃至750℃之间变化。描述了用于表征气体敏感层性质的自动化测量系统。还提出了阻抗和导纳测量的结果,作为商业和内部开发传感器的频率和工作温度的函数。

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