Facile Synthesis of Photosensitive Poly(semi-alicyclic benzoxazole) and Subsequent Low-Temperature Cyclization of Poly(o-hydroxy amide)

摘要

Photosensitive polybenzoxazoles (PSPBOs)1 are attracting materials in a field of microelectronics industry owing to not only remarkably thermal and mechanical properties, which are comparable to photosensitive polyimides (PSPIs), but also low dielectric characters unlike PSPIs By using PSPBOs or PSPIs, the processing steps are simplified for the fabrication of electronic devices containing metal wiring embedded in these thermally stable polymers.