Monolayer and Langmuir-Blodgett Films of Poly (tetrafluoroethylene-co-bistrifluoromethyl-4, 5-difluoro-1, 3 dioxole)-Teflon AF

摘要

Films from polymers with low dielectric constants are increasingly being used by the electronic industry as interlayer dielectrics and passivation and protective coatings in integrated circuit fabrication.