Coatings prepared from water suspensions of 50nm boehmite particles were used for planarization of the rough metal and metal oxide substrates.It was shown that with the addition of the proper wetting agents,films with thickness up to 10 mu m could be annealed at 1000C with no separation from the substrate or cracking of the film.It was found that because of their minimal shrinkage,films from these suspensions were able to planarize surfaces with the surface relief up to 10 mu m.Experimental results of the surface planarization and theoretical consideration of the process are also presented.
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