Microsystems for Diverse Application using Recently Developed Microfabrication Techniques

摘要

The continuous progress in micro and mano-system technologies has allowe dthe successful development of many innovative products in process control, environmetnal monitoring, healthcare, automotive and aerospace as well as informatioin procesisng systems. In this paper on overview will be given of current progress in micro-and nanofabrication process technologies, such as deep reactive ion etching, micro-electro discharge machining, thick photoesist processing and plating. The availability of these micro-and nanofabrication processes will be illustrated with examples of new genrations of silicon-based sensors, actuators and Microsystems with a particular emphasis on real applications of these components and systems.