Extraction of Frequency Dependent Macro-Models for Gas Damping and Spring Effects for MEMS Devices

摘要

In this paper, we present an efficient macromodel extraction technique for gas damping and spring effects for arbitrarily shaped geometry. The technique applies an Arnoldi-based model-order-reduction algorithm to generate low-order models from a FEM approximation of the linearized Reynolds equation. We demonstrate that this approach for generating the frequency-dependent gas-damping model is more than 100 times faster than previous approaches, which solves the linearized Reynolds equation using a transient finite-element method. The low-order gas-damping model can be easily inserted into a system-level modeling package for transient and frequency analysis. The simulated results are in good agreement with experimental results for four different devices.