A SIMULATION BASED ANALYSIS OF THE EFFECT OF SCHEDULING AND LOT RELEASE ON CYCLE TIME DISTRIBUTION AND THROUGHPUT IN SEMICONDUCTOR BACKEND

摘要

In this paper we analyze the relationship between input variables and output variables in semiconductor backend manufacturing system, using a data driven, discrete event simulation model. Our analysis includes quantifying the effect of a number of controllable input variables on selected output variables, including throughput and cycle time distribution. A validated model was used as the base case and the effects were quantified against the base model to analyze the relative merits and sensitivity of each of these input variables. Input variables that are analyzed include machine up time, setup time, material handling time, process time, product flow, lot size, heuristic scheduling rules and lot release controls. We have used live system data from a major semiconductor back-end site based in Singapore for our analysis.