USING AUTOMATIC DATA COLLECTION TO ACCELERATE FAB IMPROVEMENTS

摘要

International SEMATECH is working with its member companies to implement automatic data collection (for equipment and operational improvements) in semiconductor manufacturing facilities. Using the E58 (ARAMS) Standard as the model the results have been surprising - all implementations show considerable variance (in the major E10 states) between the legacy systems and the new data collected automatically. The errors in data are usually directly attributable to errors induced by manual input. This paper discusses the current state of automatic data collection, what needs to be done to take automatic data collection (ADC) to the next level, lessons learned, and examples of using ADC to improve equipment performance and the operational process.