Production Environment and Air Supply Form of Ultra-Large Scale Integrated Circuit (ULSI)

机译：超大型集成电路（ULSI）的生产环境和供气形式

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摘要

Detailed description is made for the structural arrangement, air supply form as well as the composition and characteristics of micro environment technology of ULSI. Since the requirement of ULSI development on the production environment is becoming stricter and stricter, the micro environment technology can just meet this kind of requirement.

机译：详细描述是结构布置，空气供给形式以及ULSI微环境技术的组成和特征。由于ULSI开发对生产环境的要求变得更加严格，微观环境技术可以达到这种要求。

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《International Conference on Engineering and Technological Sciences》|2001年||共9页
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作者
Liqun Zhang;
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原文格式 PDF
正文语种
中图分类 T-532;
关键词
ULSI; cleanroom; production environment; air supply form; micro environment;

机译：Ulsi;洁净室;生产环境;空气供应形式;微环境;

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1. Challenges to manufacturing submicron, ultra-large scale integrated circuits [J] . Fair R.B. Proceedings of the IEEE . 1990,第11期

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2. Thin-Film Transistor and Ultra-Large Scale Integrated Circuit: Competition or Collaboration [J] . Yue Kuo Japanese journal of applied physics . 2008,第3issue2期

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3. A Built-in Technique for Probing Power Supply and Ground Noise Distribution Within Large-Scale Digital Integrated Circuits [J] . Makoto Nagata, Takeshi Okumoto, Kazuo Taki IEEE Journal of Solid-State Circuits . 2005,第4期

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4. Production Environment and Air Supply Form of Ultra-Large Scale Integrated Circuit (ULSI) [C] . Liqun Zhang International Conference on Engineering and Technological Sciences . 2001

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6. Large-Scale Clinical Systems. Large Scale Integrated Ambulatory Care Systems: Evolution of a Patient Information Management System in a Local Area Network Environment at Loyola University of Chicago Medical Center [O] . Ronald N Price Jr., Arcot J Chandrasekhar, Balaji Tamirisa 1990

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7. New Technologies for Scaled-down Cu Interconnection in Ultra-Large Scale Integrated Circuits. Prospects on Copper Plating Systems for Ultra-large Scale Integrated Circuits. [O] . Hidemi NAWAFUNE 1998

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Production Environment and Air Supply Form of Ultra-Large Scale Integrated Circuit (ULSI)

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