Differential Confocal Microscopy with Annular Pupil Filter

摘要

We combine the differential confocal microscopy and annular pupil filter together. The theory of differential confocal microscopy and the property of the annular pupil filter are discussed in detail. The results of computer simulation and experiment prove that this method can extend the axial dynamic range and improve transversal resoltuion of 3-D profilometry at sacrificing axial resolution.