A study on the deposition method using piezoelectric atomizer and electrostatic collection - Comparison study of surface acoustic wave and mesh-type nebulizer

摘要

To deposit and pattern bio-macromolecule or organic material, we proposed a new methods using a surface acoustic wave atomizer and electrostatic deposition (SAW-ED). The SAW atomizer was compared with a mesh type nebulizer in terms of droplet size distribution, particle charge and temperature rise. In case of nebulizer, deposited mean particle diameter was 0.51 μm, and that of initial atomized droplet estimated to be 6.4 μm. In case of SAW-ED, 1.6 μm droplets are atomized into 0.13 μm dried particles. Droplet is charged with approximately 2 electrons by 5000 volts applied. Absorbed high frequency wave energy of the SAW device caused liquid layer to increase its temperature. Nebulizer doesn't have any temperature variation.