Temperature stability improvement of on-chip reference elements using integrated Peltier coolers

摘要

On-chip integrated Peltier coolers have potential for the thermal control and stabilisation of highly localised sections of an silicon integrated circuit, at a minimum possible temperature. In an on-chip reference this ensures improved stability, without reducing basic device operation. This paper emphasises the experimental characterisation and, in a later stage, validation thereof. Initial results show a figure-of-merit of 0.26×10{sup}(-3) K{sup}(-1), while a temperature drop of 2.1 K can be established.