Radical Reaction Based Semiconductor Manufacturing For Very Advanced ULSI Process Integration

摘要

Semiconductor industry is continuously changing from large volume productions with very small variety of semiconductor chips,i.e.,personal computer applications,to small volume productions with very wide variety of semiconductor chips,i.e.,digital networked consumer electronics applications.Thus,very advanced process integration is essentially required to establish small volume productions with very wide variety of semiconductor chips by introducing radical reaction based semiconductor processings instead of current molecule reaction based semiconductor processings.