Effect of Electrolyte Composition on Magnetic Properties and Structure of Electrodeposited Co-Fe-Ni Alloys

摘要

Soft magnetic films with high saturation magnetization are essential components of write heads in high density magnetic recording systems and are becoming more and more important in the fabrication of miniaturized sensor and actuators.Electrodeposition is the technique of choice because the process of plating through mask allows easy and accurate definition and control of small features.Most of the current work on electrodeposited Fe-Co-Ni alloys is conducted using electrolytes containing additives to decrease the internal stress.However,the presence of additives can influence the growth of the resulting film,and thus the magnetic properties.In order to better understand the intrinsic properties of the ternary alloy and thus determine the conditions at which best magnetic properties are obtained,we systematically studied the structure and magnetic properties of high purity FeCoNi fabricated from additive-free,sulfate-based electrolytes.