Platinum Etching By-Product Deposition Analysis and Control In A Plasma Reactor with High-Temperature Cathode

摘要

Numerous studies have shown that platinum(Pt)is a viable electrode material for use with ferro-electric films such as SBT or PZT to form FeRAM cells.It's also been proposed by some as the electrode material for use with other high-K films such as BST in fabricating storage nodes for future high-density DRAMs.Pt is considered for these applications due to its chemical stability,high electrical conductivity,and low leakage current,among other reasons.