In this work, we investigated the dependence of the removal rate upon the oxidizer (peroxide) addition into commerically available slurries for a variety of films such as aluminum, titanium,titanium nitride and oxide. We found that the barrier layer materials were extremely sensitive to the peroxide addition while the removal rate varied only slightly for aluminum and oxide. The selectivity to titanium and titanium nitride drops from as high as 1000 to almost close to 1 as the mixture ratio (peroxide: slurry) increases. We proposed that the barrier layer be used to protect the oxide from being over-exposed and suppress the erosion eventually. This can be easily realized by dividing the process into two steps with each step being run at a specific peroxide mixture ratio. The experimental result unambiguously proved, for the first time, the effectiveness of this approach.
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