X - ray spectrometry in SEM and elements of the first transition series

摘要

Special care has to be taken by use of the L - lines of the elements of the first transition series for quantitative X - ray analysis in SEM. Both the positions of the maxima of the L_α - peaks and their peak shapes depend on the matrix composition and the chemical bonding of the elements. Severe peak overlaps and unknown mass absorption coefficients give rise to additional inaccuracies of the quantitative results.