Crystalline texture of CoCrPt films on CrMn/NiAl and Cr/NiAl underlayer structures

摘要

In this study, we examine the effects of CrMn/NiAl and Cr/NiAl underlayer structures on the crystalline texture and microstructure of CoCrPt magnetic films using X-ray and electron diffraction. The former underlayer structure was found to inducebetter CoCrPt (1010) texture. The stress in the CoCrPt layer was measured. The effective in-plane anisotropy energy densities of the CoCrPt films on the above two underlayers were also measured by using out-of-plane torque and Miyajima methods and theresult was consistent with the texture analysis.