Modern microsystems use integrated sensors, controllers and actuators, and involve multi-physics phenomena. Detailed and accurate multi-physics based simulations are a key to device optimization and successful designs. In recent years, CFD-ACE$PLU@, a fluid flow solver has been validated and demonstrated on different MEMS devices involving coupled fluid flow, heat transfer, structural mechanics and electrostatics. Presented here are results of dynamic devices such as micropumps with dynamic valves and membrane micropumps as well as priming of a capillary pump and novel valves that use fluid surface tension for operation. Comparisons with experimental and other data are also presented to demonstrate the accuracy of multi-physics simulations. The capabilities of this state-of-the-art software and its usefulness in MEMS design environment is demonstrated.
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机译：现代微系统使用集成的传感器，控制器和执行器，并涉及多物理现象。基于细微和准确的多物理模拟是设备优化和成功设计的关键。近年来，CFD-ACE $ PLU @，流体流求解器已经验证并在涉及耦合流体流动，传热，结构力学和静电装置的不同MEMS器件上进行了验证和证明。此处提出的是动态设备，例如具有动态阀门和膜微泵的微型泵以及毛细管泵和使用流体表面张力操作的新型阀门的灌注。还提出了实验和其他数据的比较来证明多物理模拟的准确性。证明了这种最先进的软件及其在MEMS设计环境中的有用性的能力。
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