Properties of Ti-Si-N Hard Coatings Prepared by Filtered Vacuum Arc Source and Magnetron Sputtering Cathode

摘要

Ti-Si-N nanocomposite coatings have been investigated using a hybrid coating system. The elimination of macro particles and the control of Si content should be accompanied to realize high quality of coating layer since macro particles induce corrosive reaction and the Si content of Ti-Si-N coating affects the mechanical properties such as hardness and friction coefficient. We introduced the hybrid coating system which consists of double bending filtered vacuum arc system (DBFVAS) and magnetron sputter cathode to solve two problems such as the macro particles and the control of Si content in Ti-Si-N coatings. The DBFVAS and magnetron sputter equipped with Ti cathode and Si cathode target, respectively. Ar and N2 are used for discharge and reaction gas and operating pressure is 0.6 mTorr. We confirmed that the DBFVAS reduced macro particles effectively and the Si content could be changed by controlling the applied power on magnetron sputtering cathode. The properties of Ti-Si-N coating layer are estimated by X-ray diffraction, X-ray photoelectron spectroscopy, wear test and nano indentation. And we compared Si content with Si emission (594.84 nm) of process chamber using an optical emission spectroscopy.