Advanced characterization of ultra-low-k periodic porous silica films-pore size distribution, pore-diameter anisotropy, and size and macroscopic isotropy of domain structure

摘要

We have shown previously the results from out-of-plane and in-plane X-ray scattering/di (Traction measurements together with transmission electron microscope and X-ray reflectance measurements and shown that they are effective in characterization of a periodic porous silica low-k film [1], In the present work, we report the results on pore-size distribution, pore-diameter anisotropy, and size and macroscopic isotropy of domain structure.