Status of industry standards for liquid chemical distribution systems

摘要

After several years of effort through the SEMI Subcommittee on Liquid Chemical Distribution Systems and a variety of Task Forces, a number of new standards have been approved and are now published in the Book of SEMI Standards (BOSS) or are in the process of being published. This paper focuses on one task force in particular as relates to Liquid Chemical Distribution Systems: Systems Definition, Certification & Design. This paper presents the four finalized standards developed by this task force, provides some background information, and discusses the usefulness of these standards in the industry. The four guidelines are: · Guide for Bulk Chemical Distribution Systems · Guide for On-Site Chemical Generation (OSCG) Systems · Guide for Chemical Blending Systems · Guide for Qualification of a Bulk Chemical Distribution System Used in Semiconductor Processing