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Plasmons on luminescent porous silicon prepared with ethanol and critical point drying

机译:用乙醇和临界点干燥制备发光多孔硅的等离子体

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We investigated the plasmon characteristics on luminescent porous silicon using electron energy loss spectroscopy. The samples were prepared from p-type crystalline silicon, (100) face, using the conventional electrochemical etching technique with the usual solution of HF, ethanol and water, followed by a critical point drying process. The energy of the bulk plasmon was measured both before and after sputter cleaning the sample with argon-ion bombardment. We found that initially the plasmon energy was slightly higher, approx 18 eV, that the plasmon energy of crystalline silicon. After sputter cleaning the sample with 5 keV Ar~+ ions, the plasmon energy increased to approx 20 eV. Exposure to the electron beam used for the measurements caused a slow upward shift of the plasmon energy as a function of time, toward a saturation energy of 22-23 eV, an energy close to the plasmon energy of SiC. Auger spectroscopy performed in parallel showed an increasing carbon coverage. We prepared also samples without ethanol in the etching solution and/or with no critical point drying. Samples that did not undergo the critical point drying process showed consistently a practically constant plasmon energy, with almost no change upon sputtering and/or exposure to the electron beam. On the other hand, samples that were prepared with or without ethanol but using the critical point drying process, showed an appreciable increase in the plasmon energy upon exposure to the electron beam.
机译:我们使用电子能损光谱研究了发光多孔硅上的等离子体特性。使用具有常规电化学蚀刻技术的P型晶体硅,(100)面制备样品,其具有常规的HF,乙醇和水溶液,然后是临界点干燥过程。在用氩离子轰击的溅射清洁样品之前和之后测量散装等离子体的能量。我们发现,最初的等离子体能量略高,大约18eV,即晶体硅的等离子体能量。用5 kev ar〜+离子溅射清洁样品后,等离子体能量增加到大约20eV。暴露于用于测量的电子束导致等离子体能量的慢速向上偏移,朝向22-23eV的饱和能量,靠近SiC等离子体能量的能量。并联执行的螺旋螺旋镜显示出碳覆盖率的增加。我们在蚀刻溶液中没有乙醇制备样品和/或没有临界点干燥。没有经历临界点干燥过程的样品始终存在实际恒定的等离子体能量,在溅射和/或暴露于电子束时几乎没有变化。另一方面,用或不含乙醇制备但使用临界点干燥过程的样品,在暴露于电子束时显示了等离子体能量的明显增加。

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