Ultra-Pure Cleaning and Surface Engineering of Metals, Glasses, Ceramics, and Polymers through Plasma Processes

摘要

Plasma cleaning, plasma activation with non-polymerizable gases, and plasma polymerized coatings are all valuable processes for engineering surfaces of metals, polymers, glasses, and ceramics. Cycle times are rapid and the processes are easily automated, providing for excellent quality control and minimum overhead. This paper provides several examples of the range of applications that are possible, including diagnostic equipment manufacture, disposable labware manufacture, and chemical product packaging.