Binary optics used in high-power laser shaping

摘要

On the basis of the analysis of the existed optimization algorithms, three kinds of hybrid algorithms are developed for phase design of the Binary Optical Element to realize beam shaping, including Global/local united search algorithm (GLUSA), the modified GLUSA, and the modified GLUSA with multi-resolution. Four masks have been used to produce a $phi@50 mm binary phase plate with 16-phase level relief surface structure for wavelength 0.6328 $mu@m and an optical CT method has been used for measuring the intensity distribution. A continuous phase plate, with operating wavelength 1.053 $mu@m and diameter 100 mm, is manufactured by ion-etching technique with gray-scale mask on the K9- glass substrate. The intensity distribution of the focused spot is measured by a common CCD and multi-attenuators with which the measurement dynamic range is increased. The experimental results after data processing show that the focused spot with steep edge, low side lobe and a certain uniformity of the main lobe without sharp peak at the zero order is obtained.